WebJun 6, 2012 · tz101 (Mechanical) 15 May 12 13:34. Critical dimensions are subjective, based upon the function of the particular component being inspected. You would have to … Webinspection (ADI) and after-etch inspection (AEI) layer structures. For these structures, the critical measurement parameters include side wall angle (SWA) and critical dimension (CD). For production process control of these structures, a metrology tool must utilize a non-destructive measurement technique, and have high sensitivity, precision

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WebUniversity of California, San Diego WebVarious measurement techniques may be used for the Develop Inspection Critical Dimensions step 104 and the Final Inspection Critical Dimensions step 108 including scanning electron... town of wellesley

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